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EEE Components, PASSIVES

Silicon and Silicon Wafer Based Integrated Capacitors

  • Posted by doEEEt Media Group
  • On May 15, 2023
  • 0
Silicon-based capacitors are typically single MIM (metal-insulator-metal) or multiple MIM structure electrostatic capacitors built by semiconductor technologies. Silicon dielectrics are either silicon dioxide (MIS) or silicon nitride (MOS) insulating layers; however, semiconductor manufacturing techniques such as atomic layer deposition (ALD) can be used to form other dielectric materials on top of the silicon substrate. High-density silicon-based capacitors use 3D nano-structured electrodes to achieve higher surface area and, thus, higher capacitance value.
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