MIL-STD-883, Method 5013 Electrical Test Method Standard for Microcircuits: Wafer fabrication control and wafer acceptance procedures for processed GaAs wafers
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This method specifies wafer fabrication control and wafer acceptance requirements for GaAs monolithic microcircuits for application in class level B or class level S microcircuits.
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MIL-STD-883, Method 5013
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