In high-reliability industries such as aerospace, automotive, and aviation, ensuring the structural integrity of electronic components is essential for safe and reliable operation. Interfacial defects such as delamination may significantly compromise device performance and long-term reliability if not properly detected and characterised.
Non-destructive inspection techniques such as Scanning Acoustic Microscopy (C-SAM) are widely used for detecting internal defects. However, their effectiveness may be limited when inspecting devices with complex geometries or irregular internal structures.
This article highlights the importance of Scanning Electron Microscopy (SEM) as a strategic tool for confirming, characterising, and understanding microstructural defects that may remain undetected using acoustic inspection methods. A case study involving the inspection of electronic devices illustrates the complementary role of SEM in high-reliability quality control and failure investigation processes.
Introduction
Electronic devices used in aerospace systems, automotive electronics, and avionics applications must meet extremely demanding reliability requirements. These systems operate under harsh environmental conditions including:
- Severe thermal cycling
- Mechanical vibration
- Humidity exposure
- Vacuum environments
- Radiation
- Long-term mechanical and thermomechanical stress
Under such conditions, internal structural defects such as delamination between critical interfaces can lead to progressive degradation and eventual device failure.
Potential consequences of undetected delamination include:
- Increased thermal resistance
- Localized stress concentration
- Degradation of the die attach interface
- Accelerated fatigue mechanisms
- Catastrophic electrical failure
For this reason, advanced quality assurance strategies rely on a combination of non-destructive inspection methods and high-resolution microstructural characterization techniques.
Among these techniques, Scanning Electron Microscopy (SEM) plays a key role in providing detailed insights into the integrity of internal interfaces.
Non-Destructive Inspection Using C-SAM
Scanning Acoustic Microscopy (C-SAM) is widely used as a primary non-destructive inspection technique for detecting internal defects in semiconductor packages and electronic assemblies.
The technique is particularly effective in identifying:
Delamination
Voids
Internal cracks
C-SAM operates by transmitting ultrasonic waves into the material and analysing the reflected signals from internal interfaces where acoustic impedance changes occur.
Despite its effectiveness, the technique presents certain limitations when inspecting structures with irregular or curved geometries. In such cases, the propagation of ultrasonic waves may be affected by scattering, which reduces the energy reflected toward the transducer.
As a result, defects located at certain interfaces may not produce sufficient acoustic contrast to be detected.
This limitation becomes particularly relevant when evaluating devices intended for mission-critical applications.
Scattering of Ultrasonic Waves on Curved Interfaces in Acoustic Inspection
Case Study: Inspection of Electronic Devices
During a quality inspection process performed on semiconductor devices, a series of analyses was conducted using C-SAM, cross-sectioning, and Scanning Electron Microscopy.
The C-SAM inspection was performed following the PEM-INST-001 (2003) inspection method. The analysis did not reveal any unacceptable deviations according to the specified acceptance criteria.
However, several minor and acceptable anomalies were observed, including:
- Partial paddle delamination affecting less than 50% of the backside or top peripheral area (DP05A)
Although this observation was considered acceptable within the defined criteria, further analysis was performed to better understand the structural condition of the device.
C-SAM reveals no anomalies in the die attach (paddle)
Cross-Section and SEM Analysis
Subsequent destructive analysis using cross-sectioning combined with Scanning Electron Microscopy revealed the presence of a delamination at the interface between the paddle and the anode die attach.
Interestingly, this delamination had not been previously detected during the C-SAM inspection.
The absence of acoustic detection was attributed to the curved geometry of the paddle surface. This geometry causes dispersion of the ultrasonic waves during acoustic inspection, preventing sufficient energy from being reflected back to the transducer.
As a consequence, the acoustic signal did not generate enough contrast to reveal the presence of the interfacial defect.
SEM imaging of the cross-section provided clear confirmation of the delamination and allowed detailed visualisation of the interfacial separation.
This observation highlights an important limitation of acoustic inspection techniques when evaluating devices with non-planar internal structures.
SEM inspection reveals anomalies in the die attach (paddle/die attach).
The Value of SEM in Quality Control
Scanning Electron Microscopy offers several advantages that make it an essential tool in the quality control and reliability assessment of electronic devices.

High Spatial Resolution
SEM enables imaging at micrometer and sub-micrometer scales, allowing the detection of very small structural defects such as:
- Micro-delaminations
- Micro-cracks
- Interfacial separations
These defects may remain undetected using conventional non-destructive inspection techniques.

High Depth of Field
The large depth of field provided by SEM allows detailed visualization of complex surface morphologies and fracture features, facilitating the analysis of:
- Interfacial bonding conditions
- Morphology of delamination regions
- Structural integrity of die attach materials

Failure Mode Characterization
SEM enables the identification of different failure mechanisms, including:
- Adhesive failures at interfaces
- Cohesive failures within materials
- Structural degradation of bonding layers
Such information is essential for understanding the root cause of defects and improving manufacturing processes.

Integration with Microanalytical Techniques
When combined with Energy Dispersive Spectroscopy (EDS), SEM can provide additional information regarding:
- Elemental composition
- Presence of contaminants
- Chemical degradation processes
This capability significantly enhances failure analysis and reliability investigations.
Reliability Assessment Through Temperature Cycling
In order to determine whether the observed delamination represents an isolated defect or a potential reliability concern affecting additional components, the inspected devices will undergo temperature cycling testing.
Temperature cycling is an environmental stress test commonly used to evaluate the robustness of electronic assemblies under repeated thermal expansion and contraction.
This type of testing is particularly relevant for devices intended for aerospace, automotive, and aviation applications, where components are frequently exposed to significant thermal gradients during operation.
The test will subject the devices to controlled thermal cycling between defined temperature limits, enabling evaluation of possible defect evolution mechanisms such as:
Propagation of existing delamination regions
Initiation of new interfacial separations
Degradation of die attach interfaces
Thermomechanical stress-induced failures
After completion of the temperature cycling test, the components will be re-inspected using C-SAM. When necessary, additional destructive analysis using cross-sectioning and SEM will be performed to evaluate any structural changes.
This approach will allow investigators to determine whether the observed delamination corresponds to:
- A localised manufacturing anomaly affecting only specific devices, or
- A structural weakness that may propagate under thermomechanical stress conditions.
Conclusion
Scanning Electron Microscopy represents a critical tool in the quality control and reliability evaluation of electronic devices designed for high-reliability applications.
The case presented in this article demonstrates that although non-destructive inspection techniques such as C-SAM are highly effective for initial defect screening, their detection capability may be limited in structures featuring complex or curved geometries.
In the investigated device, the dispersion of ultrasonic waves caused by the curved paddle surface prevented the acoustic detection of an interfacial delamination. However, destructive cross-section analysis combined with SEM imaging successfully confirmed the presence of the defect and enabled detailed microstructural characterization.
SEM provides significant advantages in this context, including:
- High spatial resolution for detecting microstructural defects
- Detailed morphological characterization of critical interfaces
- Identification of failure mechanisms
- Support for root cause analysis and reliability investigations
To further evaluate the reliability impact of the detected defect, the components will undergo temperature cycling testing. Post-test inspection using C-SAM and SEM will allow assessment of defect evolution and determination of whether the observed delamination represents an isolated anomaly or a potential reliability concern.
In industries where operational reliability is essential and failure is not an option, the integration of non-destructive inspection techniques with destructive microstructural analysis and environmental stress testing provides a robust and comprehensive strategy for ensuring device integrity and long-term performance.
Post related
SEM and C-SAM confirm delamination growth after temperature cycling, revealing reliability risks and manufacturing-related defects.


